Silicon pore optics for high-energy optical systems
This thesis examines silicon pore optics (SPO), a technology that exploits silicon wafers from the semiconductor industry to create extremely high quality X-ray optics, by studying its manufacturing process, applications, and prospects.
- Girou, D.A.
- 14 June 2022
- Thesis in Leiden Repository
SPO technology has become very mature thanks to the continuous development efforts to prepare for the industrial production of Athena, the largest space-borne X-ray telescope yet to be launched. In effect, SPO is also a versatile technology that can be further developed for a wide range of applications, including radiation therapy.