2 search results for “extreem ultraviolet euv lithografie” in the Public website
LEELIS Conference on future of computer chips
A collaboration of physicists and chemists organized the LEELIS conference on new computer chip technology in Amsterdam on 10-11 November. Leiden physicist Joost Frenken is director of the organizing institute ARCNL.
Electrons give resist layer electrical charge
Leiden physicists found a surprising interaction between electrons and a resist layer. The resist appears to charge and discharge due to incoming electrons. Publication in Physical Review Letters.